Plasma Etcher

instruments

Author

Affiliation

Thomas Gredig

California State University Long Beach

Published

August 4, 2021

The Plasma Etcher PE-25 is used to clean samples. It works with oxygen and provides 400W power.

SOP: Plasma Etcher SOP

Citation

BibTeX citation:

@misc{gredig2021,
  author = {Gredig, Thomas},
  title = {Plasma {Etcher}},
  date = {2021-08-04},
  url = {https://www.csulb.edu/~tgredig/posts/news/2021-08-04-plasma-etcher.html},
  langid = {en}
}

For attribution, please cite this work as:

Gredig, Thomas. 2021. “Plasma Etcher.” https://www.csulb.edu/~tgredig/posts/news/2021-08-04-plasma-etcher.html.