Sputter Coater

instruments

Author

Affiliation

Thomas Gredig

California State University Long Beach

Published

January 1, 2022

The EMS 575X turbo sputter coater from Electron Microscope Sciences can deposit thin films of Cr, Au, Pt, and Al. The model is EMS575X, which can have two targets at a time. It requires two gas sources, argon and nitrogen. It has been replaced by the model EMS 150T S Plus.

It comes with a QCM to measure the deposited thickness.

SOP: [Sputter Coater SOP]https://thomasgredig.github.io/SOP-collection/ems-575x-sputter-coater.html)

Citation

BibTeX citation:

@misc{gredig2022,
  author = {Gredig, Thomas},
  title = {Sputter {Coater}},
  date = {2022-01-01},
  url = {https://www.csulb.edu/~tgredig/posts/news/2021-07-22-sputter-coater.html},
  langid = {en}
}

For attribution, please cite this work as:

Gredig, Thomas. 2022. “Sputter Coater.” https://www.csulb.edu/~tgredig/posts/news/2021-07-22-sputter-coater.html.